Air-clad suspended nanocrystalline diamond ridge waveguides

verfasst von

A. Abdou, P. Panduranga, J. Richter, E.L.H. Thomas, Soumen Mandal, O.A. Williams, J. Witzens, M.P. Nezhad

Abstract

A hybrid group IV ridge waveguide platform is demonstrated, with potential application across the optical spectrum from ultraviolet to the far infrared wavelengths. The waveguides are fabricated by partial etching of sub-micron ridges in a nanocrystalline diamond thin film grown on top of a silicon wafer. To create vertical confinement, the diamond film is locally undercut by exposing the chip to an isotropic fluorine plasma etch via etch holes surrounding the waveguides, resulting in a mechanically stable suspended air-clad waveguide platform. Optical characterization of the waveguides at 1550 nm yields an average optical loss of 4.67 ± 0.47 dB/mm. Further improvement to the fabrication process is expected to significantly reduce this waveguide loss.

Externe Organisation(en)

Cardiff University

Typ

Artikel

Journal

Optics express

Band

26

Seiten

13883

Anzahl der Seiten

1

ISSN

1094-4087

Publikationsdatum

2018

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

Elektronische Version(en)

https://doi.org/10.1364/OE.26.013883 (Zugang: Offen)